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34-1102 (technical revision)
0% min and Ethyl benzene 1% max
SEMI C16 — Guide for Precision Reporting/Data Traceability
1 The scope of this Standard is a grade of 45% potassium hydroxide solution used in the semiconductor industry
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
C00602 - SEMI C6.2 - Particle Specification for Grade 20/0.02 Oxygen Delivered as Pipeline Gas StdTpc-Gases - Atmospheric 34-1102 (technical revision)This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www. semiviews. org and www. semi. org in November 2011; originally published in 1993; previously published November 2002. NOTICE: This Document is no longer supported by the global technical committee. It has been replaced by SEMI C97. The purposes
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